Structural and mechanical properties of AlTiTaZr( N) medium entropy films (MEF) obtained by DC magnetron sputtering in dynamic mode

Mohamed El Garah (1) , Sofiane Achache (1) , Alexandre Michau (2) , Frederic Schuster (2, 1) , Frédéric Sanchette (1)

1 LASMIS - Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
2 CEA - Commissariat à l'énergie atomique et aux énergies alternatives

Domaines: Sciences de l'ingénieur [physics]

Mohamed El Garah, Sofiane Achache, Alexandre Michau, Frederic Schuster, Frédéric Sanchette. Structural and mechanical properties of AlTiTaZr( N) medium entropy films (MEF) obtained by DC magnetron sputtering in dynamic mode. Surface and Coatings Technology, 2020, 396, pp.125941. ⟨10.1016/j.surfcoat.2020.125941⟩. ⟨hal-03563493⟩