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Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence

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https://hal-utt.archives-ouvertes.fr/hal-03565503
Contributor : Akram Alhussein Connect in order to contact the contributor
Submitted on : Friday, February 11, 2022 - 8:18:43 AM
Last modification on : Sunday, June 26, 2022 - 4:49:41 AM

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  • HAL Id : hal-03565503, version 1

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CNRS | UTT

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Elia Zgheib, Akram Alhussein, Mohamed Fares Slim, Khaled Khalil, Manuel François. Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence. Residual stresses: New tools for new challenges, Jan 2020, Aussois, France. ⟨hal-03565503⟩

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