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Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence

Elia Zgheib
Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
Akram Alhussein
Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
Mohamed Fares Slim
  • Function : Author
Khaled Khalil
  • Function : Author
  • PersonId : 1021477
Manuel François
Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée

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https://hal-utt.archives-ouvertes.fr/hal-03565503

Submitted on : Friday, February 11, 2022-8:18:43 AM

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hal-03565503 , version 1 (11-02-2022)

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Elia Zgheib, Akram Alhussein, Mohamed Fares Slim, Khaled Khalil, Manuel François. Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence. Residual stresses: New tools for new challenges, Jan 2020, Aussois, France. ⟨hal-03565503⟩

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