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Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence

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hal-03565503 , version 1 (11-02-2022)

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  • HAL Id : hal-03565503 , version 1

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Elia Zgheib, Akram Alhussein, Mohamed Fares Slim, Khaled Khalil, Manuel François. Multiscale characterization of the elasticity of anisotropic thin films sputtered at oblique incidence. Residual stresses: New tools for new challenges, Jan 2020, Aussois, France. ⟨hal-03565503⟩

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