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Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films

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https://hal-utt.archives-ouvertes.fr/hal-03565086
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Submitted on : Thursday, February 10, 2022 - 5:49:45 PM
Last modification on : Sunday, June 26, 2022 - 9:32:53 AM

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Linda Aissani, Mamoun Fellah, Ahlam Belgroune, Aleksei Obrosov, Mohammed Abdul Samad, et al.. Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films. Surfaces and Interfaces, Elsevier, 2021, 26, pp.101441. ⟨10.1016/j.surfin.2021.101441⟩. ⟨hal-03565086⟩

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