Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films

Linda Aissani , Mamoun Fellah , Ahlam Belgroune (1) , Aleksei Obrosov , Mohammed Abdul Samad , Akram Alhussein (1)

1 LASMIS - Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée

Domaines: Matériaux

Linda Aissani, Mamoun Fellah, Ahlam Belgroune, Aleksei Obrosov, Mohammed Abdul Samad, et al.. Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films. Surfaces and Interfaces, 2021, 26, pp.101441. ⟨10.1016/j.surfin.2021.101441⟩. ⟨hal-03565086⟩