Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films - Archive ouverte HAL Access content directly
Journal Articles Surfaces and Interfaces Year : 2021

Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films

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1
Linda Aissani
  • Function : Author
Mamoun Fellah
Aleksei Obrosov
Mohammed Abdul Samad
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hal-03565086 , version 1 (10-02-2022)

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Linda Aissani, Mamoun Fellah, Ahlam Belgroune, Aleksei Obrosov, Mohammed Abdul Samad, et al.. Effect of O2 flow rate on the structure, wettability and tribo-mechanical behaviour of Zr-O-N thin films. Surfaces and Interfaces, 2021, 26, pp.101441. ⟨10.1016/j.surfin.2021.101441⟩. ⟨hal-03565086⟩

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