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Patents Year : 2012

Method of nanostructuring a film or a wafer of material of the metal oxide or semiconductor type

(1) ,
1
Gilles Lerondel
Laboratoire de Nanotechnologie et d'Instrumentation Optique
CV
Laurent Divay
  • Function : Author

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Engineering Sciences [physics] Optics / Photonic

Jean-Baptiste VU VAN  : Connect in order to contact the contributor

https://hal-utt.archives-ouvertes.fr/hal-03141933

Submitted on : Monday, February 15, 2021-4:06:09 PM

Last modification on : Sunday, June 26, 2022-4:46:51 AM

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hal-03141933 , version 1 (15-02-2021)

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  • HAL Id : hal-03141933 , version 1

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Gilles Lerondel, Laurent Divay. Method of nanostructuring a film or a wafer of material of the metal oxide or semiconductor type. United States, Patent n° : US2012133029 (A1). 2012. ⟨hal-03141933⟩

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