Effects of oxygen flow rate on the properties of ZnO thin films prepared by DC reactive magnetron sputtering - Archive ouverte HAL Access content directly
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Effects of oxygen flow rate on the properties of ZnO thin films prepared by DC reactive magnetron sputtering

, (1) , ,
1
Fazia Bouaraba
  • Function : Author
Salim Lamri
  • Function : Author
  • PersonId : 905280
Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
Nora Ziani
  • Function : Author
Mohammed Said Belkaid
  • Function : Author

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Engineering Sciences [physics]

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https://hal-utt.archives-ouvertes.fr/hal-02956329

Submitted on : Friday, October 2, 2020-4:15:44 PM

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hal-02956329 , version 1 (02-10-2020)

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  • HAL Id : hal-02956329 , version 1

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Fazia Bouaraba, Salim Lamri, Nora Ziani, Mohammed Said Belkaid. Effects of oxygen flow rate on the properties of ZnO thin films prepared by DC reactive magnetron sputtering. International Conference on Fracture Mechanics "FRACT'3", Nov 2016, Chlef, Algeria. ⟨hal-02956329⟩

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