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Effects of oxygen flow rate on the properties of ZnO thin films prepared by DC reactive magnetron sputtering

Fazia Bouaraba Salim Lamri 1 Nora Ziani Mohammed Said Belkaid
1 LASMIS - Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
ICD - Institut Charles Delaunay
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02956329
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Friday, October 2, 2020 - 4:15:44 PM
Last modification on : Saturday, October 3, 2020 - 3:58:00 AM

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  • HAL Id : hal-02956329, version 1

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Fazia Bouaraba, Salim Lamri, Nora Ziani, Mohammed Said Belkaid. Effects of oxygen flow rate on the properties of ZnO thin films prepared by DC reactive magnetron sputtering. International Conference on Fracture Mechanics "FRACT'3", Nov 2016, Chlef, Algeria. ⟨hal-02956329⟩

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