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Structural and microstructural analysis of bifunctional TiO2/Al-Zr thin film deposited by hybrid process

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Submitted on : Monday, August 22, 2022 - 2:50:49 PM
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Caroline Villardi de Oliveira, Sylvie Migot, Akram Alhussein, Carmen Jiménez, Frédéric Schuster, et al.. Structural and microstructural analysis of bifunctional TiO2/Al-Zr thin film deposited by hybrid process. Thin Solid Films, Elsevier, 2020, 709, pp.138255. ⟨10.1016/j.tsf.2020.138255⟩. ⟨hal-02927624⟩

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