Design of SiOx slab optical waveguides
Résumé
An analysis of the dispersion relation of SiOx submicron optical waveguides in the visible and IR spectral range is presented. Here is considered that the refractive index (n) of SiOx can be tuned in the range from n=1.457-2 for 2>x>1, and a film thickness from 50nm to 1000nm. Starting from the dispersion relation and the distribution of the electric field in the waveguide; cutoff wavelength, cutoff thickness, effective refractive index, effective guide thickness and confinement factor of a selected mode are calculated.