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Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD

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hal-02870946 , version 1 (17-06-2020)

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  • HAL Id : hal-02870946 , version 1

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Imane Bouabibsa, Salim Lamri, Frédéric Sanchette. Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD. 15th International Conference on Plasma Surface Engineering, Sep 2016, Garmisch-Partenkirchen, Germany. ⟨hal-02870946⟩
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