Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD

Imane Bouabibsa; Salim Lamri; Frédéric Sanchette

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Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD

(1) , (2) , (1)

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Imane Bouabibsa

Function : Author

Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée

Salim Lamri

Function : Author
PersonId : 905280

Laboratoire LERMPS

Frédéric Sanchette

Function : Author
PersonId : 784396
ORCID : 0000-0002-4665-1891
IdRef : 177130067

Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée

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Engineering Sciences [physics]

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https://hal-utt.archives-ouvertes.fr/hal-02870946

Submitted on : Wednesday, June 17, 2020-7:41:24 AM

Last modification on : Friday, March 24, 2023-2:53:17 PM

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hal-02870946 , version 1 (17-06-2020)

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HAL Id : hal-02870946 , version 1

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Imane Bouabibsa, Salim Lamri, Frédéric Sanchette. Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD. 15th International Conference on Plasma Surface Engineering, Sep 2016, Garmisch-Partenkirchen, Germany. ⟨hal-02870946⟩

Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD

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