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Poster communications

Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD

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Poster communications
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https://hal-utt.archives-ouvertes.fr/hal-02870946
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Wednesday, June 17, 2020 - 7:41:24 AM
Last modification on : Thursday, June 18, 2020 - 3:27:07 AM

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  • HAL Id : hal-02870946, version 1

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Imane Bouabibsa, Salim Lamri, Frédéric Sanchette. Properties of Ti and Al co-doped diamond-like carbon coating deposited by hybrid process RF PECVD/PVD. 15th International Conference on Plasma Surface Engineering, Sep 2016, Garmisch-Partenkirchen, Germany. ⟨hal-02870946⟩

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