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Fabrication and Tuning of High Quality Porous Silicon (PSi) Microcavities

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hal-02866365 , version 1 (12-06-2020)

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  • HAL Id : hal-02866365 , version 1

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P. Reece, Gilles Lerondel, J. Mulders, W.H. Zheng, M. Gal. Fabrication and Tuning of High Quality Porous Silicon (PSi) Microcavities. PSST 2002, Mar 2002, Puerto de la Cruz, Spain. ⟨hal-02866365⟩

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