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Lithographically patterned silicon nanostructure towards optical gas sensing

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https://hal-utt.archives-ouvertes.fr/hal-02866310
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Friday, June 12, 2020 - 1:22:17 PM
Last modification on : Friday, August 5, 2022 - 11:22:43 AM

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  • HAL Id : hal-02866310, version 1

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Agnieszka Gwiazda, Anna Rumyantseva, Anisha Gokarna, Bijal Kottukkal Bahuleyan, Françoise Chuburu, et al.. Lithographically patterned silicon nanostructure towards optical gas sensing. NANOP2016 Nanophotonics and Micro/Nano Optics International Conference, Dec 2016, Paris, France. ⟨hal-02866310⟩

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