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Lithographically patterned silicon nanostructure towards optical gas sensing

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hal-02866310 , version 1 (12-06-2020)

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  • HAL Id : hal-02866310 , version 1

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Agnieszka Gwiazda, Anna Rumyantseva, Anisha Gokarna, Bijal Kottukkal Bahuleyan, Françoise Chuburu, et al.. Lithographically patterned silicon nanostructure towards optical gas sensing. NANOP2016 Nanophotonics and Micro/Nano Optics International Conference, Dec 2016, Paris, France. ⟨hal-02866310⟩
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