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UV photonic structures fabrication by top-down lithography

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https://hal-utt.archives-ouvertes.fr/hal-02866221
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Friday, June 12, 2020 - 12:31:54 PM
Last modification on : Saturday, June 13, 2020 - 3:37:16 AM

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  • HAL Id : hal-02866221, version 1

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Komla Nomenyo, Roy Aad, Christophe Couteau, Dave J. Rogers, Gilles Lerondel. UV photonic structures fabrication by top-down lithography. SPIE Optics and Photonics 2013, Aug 2013, San Diego, United States. ⟨hal-02866221⟩

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