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UV photonic structures fabrication by top-down lithography

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hal-02866221 , version 1 (12-06-2020)

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  • HAL Id : hal-02866221 , version 1

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Komla Nomenyo, Roy Aad, Christophe Couteau, Dave J. Rogers, Gilles Lerondel. UV photonic structures fabrication by top-down lithography. SPIE Optics and Photonics 2013, Aug 2013, San Diego, United States. ⟨hal-02866221⟩

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CNRS UTT UTT-L2N
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