Skip to Main content Skip to Navigation
Conference papers

Advanced large scale colloidal lithography for sub-100 nm direct and indirect structuring: application to silicon and metals

Document type :
Conference papers
Complete list of metadatas

https://hal-utt.archives-ouvertes.fr/hal-02866188
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Friday, June 12, 2020 - 12:20:44 PM
Last modification on : Friday, October 30, 2020 - 2:40:03 PM

Identifiers

  • HAL Id : hal-02866188, version 1

Citation

Hind Kadiri, Marco Faustini, Daniel Turover, David Grosso, Anisha Gokarna, et al.. Advanced large scale colloidal lithography for sub-100 nm direct and indirect structuring: application to silicon and metals. Tech connect World Innovation Conference & Expo, Jun 2015, Washington, United States. ⟨hal-02866188⟩

Share

Metrics

Record views

14