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Silicium microporeux

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hal-02866151 , version 1 (12-06-2020)

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  • HAL Id : hal-02866151 , version 1

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Gilles Lerondel. Silicium microporeux. Nanophotonique sur silicium, Jul 2006, Dourdan, France. ⟨hal-02866151⟩

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