Method of nanostructring a film or a wafer of material of the metal oxide or semi-conductor type - Université de technologie de Troyes Access content directly
Patents Year : 2010

Method of nanostructring a film or a wafer of material of the metal oxide or semi-conductor type

Gilles Lerondel
Laboratoire de Nanotechnologie et d'Instrumentation Optique
CV
Laurent Divay
  • Function : Author

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Optics / Photonic

Jean-Baptiste VU VAN  : Connect in order to contact the contributor

https://hal-utt.archives-ouvertes.fr/hal-02866038

Submitted on : Friday, June 12, 2020-11:13:06 AM

Last modification on : Friday, March 24, 2023-2:53:17 PM

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hal-02866038 , version 1 (12-06-2020)

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  • HAL Id : hal-02866038 , version 1

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Gilles Lerondel, Laurent Divay. Method of nanostructring a film or a wafer of material of the metal oxide or semi-conductor type. Unknown Region, Patent n° : WO2010130963 (A1). 2010. ⟨hal-02866038⟩

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