Patents
Year : 2010
Jean-Baptiste VU VAN : Connect in order to contact the contributor
https://hal-utt.archives-ouvertes.fr/hal-02866038
Submitted on : Friday, June 12, 2020-11:13:06 AM
Last modification on : Friday, March 24, 2023-2:53:17 PM
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- HAL Id : hal-02866038 , version 1
Cite
Gilles Lerondel, Laurent Divay. Method of nanostructring a film or a wafer of material of the metal oxide or semi-conductor type. Unknown Region, Patent n° : WO2010130963 (A1). 2010. ⟨hal-02866038⟩
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