Patents
Year : 2012
Jean-Baptiste VU VAN : Connect in order to contact the contributor
https://hal-utt.archives-ouvertes.fr/hal-02866026
Submitted on : Friday, June 12, 2020-11:07:39 AM
Last modification on : Friday, March 24, 2023-2:53:17 PM
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Identifiers
- HAL Id : hal-02866026 , version 1
Cite
Gilles Lerondel, Laurent Divay. Method of nanostructuring a film or a wafer of material of the metal oxide or semiconductor type. Unknown Region, Patent n° : EP2430220 (A1). 2012. ⟨hal-02866026⟩
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