https://hal-utt.archives-ouvertes.fr/hal-02866026
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Submitted on : Friday, June 12, 2020 - 11:07:39 AM Last modification on : Saturday, June 13, 2020 - 3:37:16 AM
Gilles Lerondel, Laurent Divay. Method of nanostructuring a film or a wafer of material of the metal oxide or semiconductor type. Unknown Region, Patent n° : EP2430220. 2012. ⟨hal-02866026⟩