Patents
Year : 2012
Jean-Baptiste VU VAN : Connect in order to contact the contributor
https://hal-utt.archives-ouvertes.fr/hal-02866019
Submitted on : Friday, June 12, 2020-11:05:07 AM
Last modification on : Friday, June 2, 2023-3:14:50 PM
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Identifiers
- HAL Id : hal-02866019 , version 1
Cite
David Grosso, Cedric Boissiere, Gilles Lerondel. Procédé de fabrication d'une couche mince de nanoreliefs de silicium ordonnés. France, N° de brevet: FR2993701 (A1). 2012. ⟨hal-02866019⟩
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