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Fabrication and tuning of high quality porous silicon microcavities

Abstract : We have made a number of high quality porous silicon microcavities operating in the visible and near infrared regions with a FWHM of less than 2 nm. This is achieved through the low temperature anodic oxidation of highly doped p‐type silicon wafers. Reduced interface fluctuations and very large porosity modulations are responsible for the improvement of the quality of the optical structure. We have also demonstrated thermally induced, post‐fabrication tuning of the cavity resonance, which leads to non‐permanent and repeatable changes in the cavity mode.
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https://hal-utt.archives-ouvertes.fr/hal-02865915
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Submitted on : Friday, June 12, 2020 - 10:16:23 AM
Last modification on : Saturday, June 13, 2020 - 3:37:16 AM

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Paul Reece, Gilles Lerondel, J. Mulders, W.H. Zheng, M. Gal. Fabrication and tuning of high quality porous silicon microcavities. physica status solidi (a), Wiley, 2003, 197 (2), pp.321-325. ⟨10.1002/pssa.200306517⟩. ⟨hal-02865915⟩

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