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Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

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https://hal-utt.archives-ouvertes.fr/hal-02567506
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Thursday, May 7, 2020 - 7:14:49 PM
Last modification on : Friday, August 5, 2022 - 11:24:50 AM

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E. V. Fomin, A. D. Bondarev, I. Soshnikiv, N. Bercu, L. Giraudet, et al.. Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen. Pis'ma v Zhurnal Tekhnicheskoi Fiziki / Technical Physics Letters, MAIK Nauka/Interperiodica (МАИК Наука/Интерпериодика), 2020, 46 (3), pp.268-271. ⟨10.1134/S1063785020030207⟩. ⟨hal-02567506⟩

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