Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen - Archive ouverte HAL Access content directly
Journal Articles Pis'ma v Zhurnal Tekhnicheskoi Fiziki / Technical Physics Letters Year : 2020

Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

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hal-02567506 , version 1 (07-05-2020)

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Attribution - CC BY 4.0

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E. V. Fomin, A. D. Bondarev, I. Soshnikiv, N. Bercu, L. Giraudet, et al.. Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen. Pis'ma v Zhurnal Tekhnicheskoi Fiziki / Technical Physics Letters, 2020, 46 (3), pp.268-271. ⟨10.1134/S1063785020030207⟩. ⟨hal-02567506⟩
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