Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

E. V. Fomin (1) , A. D. Bondarev (2) , I. Soshnikiv , N. Bercu (3) , L. Giraudet (3) , M. Molinari (3) , Thomas Maurer (4) , N. A. Pikhtin (2)

1 Saint Petersburg Electrotechnical University "LETI"
2 A.F. Ioffe Physical-Technical Institute
3 LRN - Laboratoire de Recherche en Nanosciences - EA 4682
4 L2n - Lumière, nanomatériaux et nanotechnologies

Domains: Optics / Photonic

E. V. Fomin, A. D. Bondarev, I. Soshnikiv, N. Bercu, L. Giraudet, et al.. Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen. Pis'ma v Zhurnal Tekhnicheskoi Fiziki / Technical Physics Letters, 2020, 46 (3), pp.268-271. ⟨10.1134/S1063785020030207⟩. ⟨hal-02567506⟩