Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

E. V. Fomin; A. D. Bondarev; I. Soshnikiv; N. Bercu; L. Giraudet; M. Molinari; Thomas Maurer; N. A. Pikhtin

doi:10.1134/S1063785020030207

Journal articles

Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

E. V. Fomin ¹ A. D. Bondarev ² I. Soshnikiv N. Bercu ³ L. Giraudet ³ M. Molinari ³ Thomas Maurer ⁴ N. A. Pikhtin ²

1 Saint Petersburg Electrotechnical University "LETI"

2 A.F. Ioffe Physical-Technical Institute

3 LRN - Laboratoire de Recherche en Nanosciences - EA 4682

4 L2n - Lumière, nanomatériaux et nanotechnologies

ICD - Institut Charles Delaunay

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Optics / Photonic

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https://hal-utt.archives-ouvertes.fr/hal-02567506
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Thursday, May 7, 2020 - 7:14:49 PM
Last modification on : Friday, August 5, 2022 - 11:24:50 AM

Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

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Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen

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