Using AlN Coatings to Protect the Surface of AlGaAs/GaAs System Heterostructures from Interaction with Atmospheric Oxygen
E. V. Fomin
(1)
,
A. D. Bondarev
(2)
,
I. Soshnikiv
,
N. Bercu
(3)
,
L. Giraudet
(3)
,
M. Molinari
(3)
,
Thomas Maurer
(4)
,
N. A. Pikhtin
(2)
I. Soshnikiv
- Function : Author
L. Giraudet
- Function : Author
- PersonId : 746194
- IdHAL : louis-giraudet
- ORCID : 0000-0002-5861-3374
- IdRef : 03379989X