Evolutionary Optimization for Plasmon-Assisted Lithography

Caroline Prodhon (1) , Demetrio Macías (2) , Farouk Yalaoui (1) , Alexandre Vial (2) , Lionel Amodeo (1)

1 LOSI - Laboratoire d'Optimisation des Systèmes Industriels
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

Domains: Computer Science [cs]; Operations Research [cs.RO]

Caroline Prodhon, Demetrio Macías, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo. Evolutionary Optimization for Plasmon-Assisted Lithography. EvoWorkshops 2009, Apr 2009, Tübingen, Germany. Springer, ⟨10.1007/978-3-642-01129-0_47⟩. ⟨hal-02555974⟩