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Evolutionary Optimization for Plasmon-Assisted Lithography

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https://hal-utt.archives-ouvertes.fr/hal-02555974
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Monday, April 27, 2020 - 5:07:34 PM
Last modification on : Wednesday, May 20, 2020 - 11:48:06 AM

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Caroline Prodhon, Demetrio Macías, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo. Evolutionary Optimization for Plasmon-Assisted Lithography. EvoWorkshops 2009, Apr 2009, Tübingen, Germany. Springer, ⟨10.1007/978-3-642-01129-0_47⟩. ⟨hal-02555974⟩

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