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Evolutionary Optimization for Plasmon-Assisted Lithography

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hal-02555974 , version 1 (27-04-2020)

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Caroline Prodhon, Demetrio Macías, Farouk Yalaoui, Alexandre Vial, Lionel Amodeo. Evolutionary Optimization for Plasmon-Assisted Lithography. EvoWorkshops 2009, Apr 2009, Tübingen, Germany. Springer, ⟨10.1007/978-3-642-01129-0_47⟩. ⟨hal-02555974⟩

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