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Nanostructuration by nanoimprint lithography of hybrid silica coatings

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https://hal-utt.archives-ouvertes.fr/hal-02526413
Contributor : Jean-Baptiste Vu Van Connect in order to contact the contributor
Submitted on : Tuesday, March 31, 2020 - 3:35:52 PM
Last modification on : Saturday, October 16, 2021 - 11:20:12 AM

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  • HAL Id : hal-02526413, version 1

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Alban Letailleur, Cedric Boissiere, François Ribot, Clément Sanchez, Jérémie Teisseire, et al.. Nanostructuration by nanoimprint lithography of hybrid silica coatings. Nanoimprint and Nanoprint Technology (NNT), Oct 2010, Copenhague, Denmark. ⟨hal-02526413⟩

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