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Nanostructuration by nanoimprint lithography of hybrid silica coatings

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Dates and versions

hal-02526413 , version 1 (31-03-2020)

Identifiers

  • HAL Id : hal-02526413 , version 1

Cite

Alban Letailleur, Cedric Boissiere, François Ribot, Clément Sanchez, Jérémie Teisseire, et al.. Nanostructuration by nanoimprint lithography of hybrid silica coatings. Nanoimprint and Nanoprint Technology (NNT), Oct 2010, Copenhague, Denmark. ⟨hal-02526413⟩
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