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Nanostructuration by nanoimprint lithography of hybrid silica coatings

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hal-02526413 , version 1 (31-03-2020)

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  • HAL Id : hal-02526413 , version 1

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Alban Letailleur, Cedric Boissiere, François Ribot, Clément Sanchez, Jérémie Teisseire, et al.. Nanostructuration by nanoimprint lithography of hybrid silica coatings. Nanoimprint and Nanoprint Technology (NNT), Oct 2010, Copenhague, Denmark. ⟨hal-02526413⟩
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