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Development of a long range nanometric precision stage for near field characterization

Luc Chassagne 1 S. Topcu 2 Yasser Alayli 1 Patrick Juncar 3 Gilles Lerondel 4 Sylvain Blaize 4 Aurélien Bruyant 4 Ilan Stefanon 4 Pascal Royer 4 
1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
2 UVSQ - Université de Versailles Saint-Quentin-en-Yvelines
3 LCM - Laboratoire commun de métrologie LNE-CNAM
4 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02521512
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Friday, March 27, 2020 - 2:58:09 PM
Last modification on : Friday, August 5, 2022 - 2:54:01 PM

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  • HAL Id : hal-02521512, version 1

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CNRS | CNAM | UVSQ | LISV | LNE | UTT | LNE-CNAM | GS-SPORT-HUMAN-MOVEMENT

Citation

Luc Chassagne, S. Topcu, Yasser Alayli, Patrick Juncar, Gilles Lerondel, et al.. Development of a long range nanometric precision stage for near field characterization. 5th EUSPEN International Conference, May 2005, Montpellier, France. ⟨hal-02521512⟩

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