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Development of a long range nanometric precision stage for near field characterization

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Engineering Sciences [physics] Optics / Photonic

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https://hal-utt.archives-ouvertes.fr/hal-02521512

Submitted on : Friday, March 27, 2020-2:58:09 PM

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hal-02521512 , version 1 (27-03-2020)

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  • HAL Id : hal-02521512 , version 1

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Luc Chassagne, S. Topcu, Yasser Alayli, Patrick Juncar, Gilles Lerondel, et al.. Development of a long range nanometric precision stage for near field characterization. 5th EUSPEN International Conference, May 2005, Montpellier, France. ⟨hal-02521512⟩

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