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Fabrication of true 3D polymer nanostructures with sub-100 nm feature sizes via femtosecond direct laser writing based on two-photon polymerization

Abstract : In this work, we demonstrate the capability to fabricate three-dimensional (3D) structures with 75 nm resolution using direct laser writing (DLW) based on two-photon polymerization. The composition of the photopolymerizable solution was tuned in order to show a strong chemical non-linearity effect by adding free radical inhibitors. The influence of the inhibitor concentration, laser power and scan speed on the resolution of as-prepared structures is also investigated. It is observed that, with the optimized inhibitor-containing formulation, the resolution is significantly improved as the scan speed increased (400 µm/s).
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02498867
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Wednesday, March 4, 2020 - 6:00:19 PM
Last modification on : Wednesday, April 1, 2020 - 1:18:01 PM

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  • HAL Id : hal-02498867, version 1

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Ying Peng, Safi Jradi, Suzanna Akil-Jradi, Renaud Bachelot. Fabrication of true 3D polymer nanostructures with sub-100 nm feature sizes via femtosecond direct laser writing based on two-photon polymerization. 9th International Conference on Material Sciences (CSM9), Aug 2015, Nancy, France. ⟨hal-02498867⟩

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