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https://hal-utt.archives-ouvertes.fr/hal-02497508
Submitted on : Tuesday, March 3, 2020-4:54:36 PM
Last modification on : Friday, March 24, 2023-2:53:15 PM
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- HAL Id : hal-02497508 , version 1
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Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩
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