Conference Papers
Year :
Jean-Baptiste VU VAN : Connect in order to contact the contributor
https://hal-utt.archives-ouvertes.fr/hal-02497508
Submitted on : Tuesday, March 3, 2020-4:54:36 PM
Last modification on : Sunday, June 26, 2022-4:45:28 AM
Dates and versions
Identifiers
- HAL Id : hal-02497508 , version 1
Cite
Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩
8
View
0
Download