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High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode

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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02497508
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Tuesday, March 3, 2020 - 4:54:36 PM
Last modification on : Wednesday, June 17, 2020 - 9:10:03 AM

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  • HAL Id : hal-02497508, version 1

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P2MN | UTT | CNRS

Citation

Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩

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