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High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode

Yann Gilbert 1 Radouane Fikri 1 Anna Rumyantseva 1 Gilles Lerondel 1 Renaud Bachelot 1 Pascal Royer 1 
1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02497508
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Tuesday, March 3, 2020 - 4:54:36 PM
Last modification on : Sunday, June 26, 2022 - 4:45:28 AM

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  • HAL Id : hal-02497508, version 1

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Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩

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