Skip to Main content Skip to Navigation
Conference papers

High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode

Document type :
Conference papers
Complete list of metadata

https://hal-utt.archives-ouvertes.fr/hal-02497508
Contributor : Jean-Baptiste Vu Van Connect in order to contact the contributor
Submitted on : Tuesday, March 3, 2020 - 4:54:36 PM
Last modification on : Wednesday, September 15, 2021 - 3:03:48 PM

Identifiers

  • HAL Id : hal-02497508, version 1

Collections

UTT | CNRS

Citation

Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩

Share

Metrics

Record views

33