High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode - Archive ouverte HAL Access content directly
Conference Papers Year :

High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode

(1) , (1) , (1) , (1) , (1) , (1)
1
Not file

Dates and versions

hal-02497508 , version 1 (03-03-2020)

Identifiers

  • HAL Id : hal-02497508 , version 1

Cite

Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩

Collections

CNRS UTT
8 View
0 Download

Share

Gmail Facebook Twitter LinkedIn More