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Conference papers
High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode
Yann Gilbert
1
Radouane Fikri
1
Anna Rumyantseva
1
Gilles Lerondel
1
Renaud Bachelot
1
Pascal Royer
1
1
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
Yann Gilbert 1
Author
Radouane Fikri 1
Author
Anna Rumyantseva 1
Author
Gilles Lerondel 1
Author IdHAL : gilles-lerondel
Renaud Bachelot 1
Author
Pascal Royer 1
Author
1
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique (12 rue Marie Curie - BP 2060 10010 TROYES CEDEX - France)
- ICD - Institut Charles Delaunay (12, rue Marie Curie BP 2060 - 10010 Troyes Cedex - France)
- UTT - Université de Technologie de Troyes (12 rue Marie Curie CS 42060 10004 TROYES CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6281 (France)
Document type :
Conference papers
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Complete list of metadatas
https://hal-utt.archives-ouvertes.fr/hal-02497508
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Tuesday, March 3, 2020 - 4:54:36 PM
Last modification on : Wednesday, June 17, 2020 - 9:10:03 AM
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Tuesday, March 3, 2020 - 4:54:36 PM
Last modification on : Wednesday, June 17, 2020 - 9:10:03 AM
Identifiers
- HAL Id : hal-02497508, version 1
Citation
Yann Gilbert, Radouane Fikri, Anna Rumyantseva, Gilles Lerondel, Renaud Bachelot, et al.. High resolution nanophotolithography in Atomic Force Microscopy (AFM) Contact mode. Nanopatterns and nanostructures at the interface, Oct 2003, Mulhouse, France. ⟨hal-02497508⟩
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