Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns

Anna Rumyantseva; Yann Gilbert; Renaud Bachelot; Fekra H'Dhili; Gilles Lerondel; Pascal Royer

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Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns

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1

Anna Rumyantseva

Function : Author

Laboratoire de Nanotechnologie et d'Instrumentation Optique

Yann Gilbert

Function : Author

Laboratoire de Nanotechnologie et d'Instrumentation Optique

Renaud Bachelot

Function : Author
PersonId : 1123329

Laboratoire de Nanotechnologie et d'Instrumentation Optique

Fekra H'Dhili

Function : Author

Laboratoire de Nanotechnologie et d'Instrumentation Optique

Gilles Lerondel

Function : Author
PersonId : 179313
IdHAL : gilles-lerondel
ORCID : 0000-0002-1942-3260
IdRef : 120689448

Laboratoire de Nanotechnologie et d'Instrumentation Optique

CV

Pascal Royer

Function : Author

Laboratoire de Nanotechnologie et d'Instrumentation Optique

Domains

Engineering Sciences [physics] Optics / Photonic

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https://hal-utt.archives-ouvertes.fr/hal-02497504

Submitted on : Tuesday, March 3, 2020-4:52:36 PM

Last modification on : Sunday, June 26, 2022-4:45:28 AM

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hal-02497504 , version 1 (03-03-2020)

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HAL Id : hal-02497504 , version 1

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Anna Rumyantseva, Yann Gilbert, Renaud Bachelot, Fekra H'Dhili, Gilles Lerondel, et al.. Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns. 5th International Topical Conference on Optical Probes of Conjugated Polymers and Organic & Inorganic Nanostructures, Feb 2003, Venice, Italy. ⟨hal-02497504⟩

Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns

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