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Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns

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hal-02497504 , version 1 (03-03-2020)

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  • HAL Id : hal-02497504 , version 1

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Anna Rumyantseva, Yann Gilbert, Renaud Bachelot, Fekra H'Dhili, Gilles Lerondel, et al.. Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns. 5th International Topical Conference on Optical Probes of Conjugated Polymers and Organic & Inorganic Nanostructures, Feb 2003, Venice, Italy. ⟨hal-02497504⟩

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