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Conference papers
Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns
Anna Rumyantseva
1
Yann Gilbert
1
Renaud Bachelot
1
Fekra H'Dhili
1
Gilles Lerondel
1
Pascal Royer
1
1
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
Gilles Lerondel 1
Author IdHAL : gilles-lerondel
Pascal Royer 1
Author
1
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique (12 rue Marie Curie - BP 2060 10010 TROYES CEDEX - France)
- ICD - Institut Charles Delaunay (12, rue Marie Curie BP 2060 - 10010 Troyes Cedex - France)
- UTT - Université de Technologie de Troyes (12 rue Marie Curie CS 42060 10004 TROYES CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6281 (France)
Document type :
Conference papers
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Complete list of metadata
https://hal-utt.archives-ouvertes.fr/hal-02497504
Contributor : Jean-Baptiste Vu Van Connect in order to contact the contributor
Submitted on : Tuesday, March 3, 2020 - 4:52:36 PM
Last modification on : Wednesday, September 15, 2021 - 3:03:47 PM
Contributor : Jean-Baptiste Vu Van Connect in order to contact the contributor
Submitted on : Tuesday, March 3, 2020 - 4:52:36 PM
Last modification on : Wednesday, September 15, 2021 - 3:03:47 PM
Identifiers
- HAL Id : hal-02497504, version 1
Citation
Anna Rumyantseva, Yann Gilbert, Renaud Bachelot, Fekra H'Dhili, Gilles Lerondel, et al.. Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns. 5th International Topical Conference on Optical Probes of Conjugated Polymers and Organic & Inorganic Nanostructures, Feb 2003, Venice, Italy. ⟨hal-02497504⟩
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