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Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns

Anna Rumyantseva 1 Yann Gilbert 1 Renaud Bachelot 1 Fekra H'Dhili 1 Gilles Lerondel 1 Pascal Royer 1 
1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
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https://hal-utt.archives-ouvertes.fr/hal-02497504
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Tuesday, March 3, 2020 - 4:52:36 PM
Last modification on : Sunday, June 26, 2022 - 4:45:28 AM

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  • HAL Id : hal-02497504, version 1

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Anna Rumyantseva, Yann Gilbert, Renaud Bachelot, Fekra H'Dhili, Gilles Lerondel, et al.. Nanolithography on azo polymer PMMA-DR1: Analysis of the contrast of generated nanopatterns. 5th International Topical Conference on Optical Probes of Conjugated Polymers and Organic & Inorganic Nanostructures, Feb 2003, Venice, Italy. ⟨hal-02497504⟩

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