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Conference papers
Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry
Yann Battie
1
Irene Izquierdo-Lorenzo
2
Amandine Resano-Garcia
1
Aotmane En Naciri
1
Suzanna Akil
1
Pierre-Michel Adam
2
Safi Jradi
2
Yann Battie 1
Author
Irene Izquierdo-Lorenzo 2
Author
Amandine Resano-Garcia 1
Author
Aotmane En Naciri 1
Author
1
LCP-A2MC - Laboratoire de Chimie et Physique - Approche Multi-échelle des Milieux Complexes (Université de Lorraine, ICPM, 1 boulevard Arago, CP 87811, 57078 Metz Cedex 3 - France)
- UL - Université de Lorraine : EA4632 (34 cours Léopold - CS 25233 - 54052 Nancy cedex - France)
2
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique (12 rue Marie Curie - BP 2060 10010 TROYES CEDEX - France)
- ICD - Institut Charles Delaunay (12, rue Marie Curie BP 2060 - 10010 Troyes Cedex - France)
- UTT - Université de Technologie de Troyes (12 rue Marie Curie CS 42060 10004 TROYES CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6281 (France)
Document type :
Conference papers
Domain :
Complete list of metadatas
https://hal-utt.archives-ouvertes.fr/hal-02481695
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Monday, February 17, 2020 - 4:08:46 PM
Last modification on : Tuesday, March 3, 2020 - 1:00:47 AM
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Monday, February 17, 2020 - 4:08:46 PM
Last modification on : Tuesday, March 3, 2020 - 1:00:47 AM
Identifiers
- HAL Id : hal-02481695, version 1
Collections
UNIV-LORRAINE | LCPA2MC-UL | P2MN | UTT | CNRS
Citation
Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry. 7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany. ⟨hal-02481695⟩
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