Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry.
7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany.
⟨hal-02481695⟩