Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry - Archive ouverte HAL Access content directly
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Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry

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Engineering Sciences [physics] Optics / Photonic

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Submitted on : Monday, February 17, 2020-4:08:46 PM

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hal-02481695 , version 1 (17-02-2020)

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  • HAL Id : hal-02481695 , version 1

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Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry. 7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany. ⟨hal-02481695⟩

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