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Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry

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https://hal-utt.archives-ouvertes.fr/hal-02481695
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Monday, February 17, 2020 - 4:08:46 PM
Last modification on : Tuesday, March 3, 2020 - 1:00:47 AM

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  • HAL Id : hal-02481695, version 1

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Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry. 7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany. ⟨hal-02481695⟩

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