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Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry

Yann Battie 1 Irene Izquierdo-Lorenzo 2 Amandine Resano-Garcia 1 Aotmane En Naciri 1 Suzanna Akil 1 Pierre-Michel Adam 2 Safi Jradi 2 
1 LCP-A2MC - Laboratoire de Chimie et Physique - Approche Multi-échelle des Milieux Complexes
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02481695
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Monday, February 17, 2020 - 4:08:46 PM
Last modification on : Sunday, June 26, 2022 - 4:44:57 AM

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  • HAL Id : hal-02481695, version 1

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CNRS | UNIV-LORRAINE | LCPA2MC-UL | UTT

Citation

Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry. 7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany. ⟨hal-02481695⟩

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