Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry

Yann Battie (1) , Irene Izquierdo-Lorenzo (2) , Amandine Resano-Garcia (1) , Aotmane En Naciri (1) , Suzanna Akil (1) , Pierre-Michel Adam (2) , Safi Jradi (2)

1 LCP-A2MC - Laboratoire de Chimie et Physique - Approche Multi-échelle des Milieux Complexes
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

Domains: Optics / Photonic

Yann Battie, Irene Izquierdo-Lorenzo, Amandine Resano-Garcia, Aotmane En Naciri, Suzanna Akil, et al.. Complete Determination of Morphological Properties and Dielectric Function of Au Nanoparticles in Photoresist Films by Ellipsometry. 7th International Conference on Spectroscopic Ellipsometry (ICSE-7), Jun 2016, Berlin, Germany. ⟨hal-02481695⟩