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Soft photo structuring of porous silicon in water

Mathieu Juan 1 Jean-Sébastien Bouillard 1 Jerome Plain 1 Renaud Bachelot 1 Pierre-Michel Adam 1 Gilles Lerondel 1 Pascal Royer 1 
1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
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Conference papers
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https://hal-utt.archives-ouvertes.fr/hal-02476523
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Wednesday, February 12, 2020 - 5:13:26 PM
Last modification on : Sunday, June 26, 2022 - 4:44:52 AM

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  • HAL Id : hal-02476523, version 1

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Mathieu Juan, Jean-Sébastien Bouillard, Jerome Plain, Renaud Bachelot, Pierre-Michel Adam, et al.. Soft photo structuring of porous silicon in water. 5th International Conference on Porous Semiconductors - Science and Technology, Mar 2007, Sitges, Spain. ⟨hal-02476523⟩

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