Skip to Main content Skip to Navigation
Journal articles

Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer

Abstract : A method based on a specific quasi-common-optical-path (QCOP) configuration for two-dimensional displacement measurement is presented. The measurement system consists of a heterodyne light source, two-dimensional holographic grating, specially designed set of half wave plates, and lock-in amplifiers. Two measurement configurations, for single and differential detection, are designed. The sensitivity, resolution and nonlinear phase error of the differential detection type are better than those of the single detection type. The experimental results demonstrate that the QCOP interferometer has the ability to measure two-dimensional displacement while maintaining high system stability.
Document type :
Journal articles
Complete list of metadatas

https://hal-utt.archives-ouvertes.fr/hal-02470621
Contributor : Daniel Gavrysiak <>
Submitted on : Friday, February 7, 2020 - 1:47:58 PM
Last modification on : Tuesday, October 6, 2020 - 4:30:49 PM

Identifiers

Collections

P2MN | UTT | CNRS

Citation

Hung-Lin Hsieh, Jyh-Chen Chen, Gilles Lerondel, Ju-Yi Lee. Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer. Optics Express, Optical Society of America - OSA Publishing, 2011, 19 (10), pp.9770. ⟨10.1364/OE.19.009770⟩. ⟨hal-02470621⟩

Share

Metrics

Record views

254