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Towards routine near-field optical characterization of silicon-based photonic structures: An optical mode analysis in integrated waveguides by transmission AFM-based SNOM

Felice Gesuele 1 Chengxin Pang 2 Grégory Leblond 1 Sylvain Blaize 1 Aurélien Bruyant 1 Pascal Royer 1 Régis Deturche 1 P. Maddalena 3 Gilles Lerondel 1 
1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
ICD - Institut Charles Delaunay
2 Laboratoire Charles Fabry / Naphel
LCF - Laboratoire Charles Fabry
3 Dipartimento di Scienze Fisiche [Naples]
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https://hal-utt.archives-ouvertes.fr/hal-02460123
Contributor : Jean-Baptiste VU VAN Connect in order to contact the contributor
Submitted on : Wednesday, January 29, 2020 - 7:18:11 PM
Last modification on : Sunday, June 26, 2022 - 12:13:41 PM

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  • HAL Id : hal-02460123, version 1

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Felice Gesuele, Chengxin Pang, Grégory Leblond, Sylvain Blaize, Aurélien Bruyant, et al.. Towards routine near-field optical characterization of silicon-based photonic structures: An optical mode analysis in integrated waveguides by transmission AFM-based SNOM. Conference Information: Spring Meeting of the European-Materials-Research-Society on Frontiers in Silicon-Based Photonics, May 2009, Strasbourg, France. ⟨hal-02460123⟩

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