Towards routine near-field optical characterization of silicon-based photonic structures: An optical mode analysis in integrated waveguides by transmission AFM-based SNOM

Felice Gesuele (1) , Chengxin Pang (2) , Grégory Leblond (1) , Sylvain Blaize (1) , Aurélien Bruyant (1) , Pascal Royer (1) , Régis Deturche (1) , P. Maddalena (3) , Gilles Lerondel (1)

1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
2 Laboratoire Charles Fabry / Naphel
3 Dipartimento di Scienze Fisiche [Naples]

Domains: Optics / Photonic

Felice Gesuele, Chengxin Pang, Grégory Leblond, Sylvain Blaize, Aurélien Bruyant, et al.. Towards routine near-field optical characterization of silicon-based photonic structures: An optical mode analysis in integrated waveguides by transmission AFM-based SNOM. Conference Information: Spring Meeting of the European-Materials-Research-Society on Frontiers in Silicon-Based Photonics, May 2009, Strasbourg, France. ⟨hal-02460123⟩