Studies of optical emission in the high intensity pumping regime of top-down ZnO nanostructures and thin films grown on c-sapphire substrates by pulsed laser deposition

Laurent Divay (1) , D. J. Rogers (2) , A. Lusson (3) , Serguei Kochtcheev (1) , Stefan Mc Murtry (2) , Gilles Lerondel (1) , F. Hosseini Téhérani (2)

1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
2 Nanovation SARL
3 GEMAC - Groupe d'Etude de la Matière Condensée

We report on the emission of Zinc Oxide (ZnO) thin films obtained by Pulsed Laser Deposition (PLD) under high intensity excitation. In order to clarify the origin of the emission bands, we compared results for high quality thin films (75 nm) before and after “top‐down” nanopatterning. A nanopattering technique was developed for this purpose. The technique combined Electron Beam Lithography (EBL) and lift‐off techniques and Inductively Coupled Plasma Reactive Ion Etching (ICP RIE). The emission spectra of the two types of samples were found to have a difference in their fine structure that was attributed, in part, to the existence of guided emission in the thin films and exciton weak confinement effects in the nanostructures. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim).

Domains: Optics / Photonic; Micro and nanotechnologies/Microelectronics

Laurent Divay, D. J. Rogers, A. Lusson, Serguei Kochtcheev, Stefan Mc Murtry, et al.. Studies of optical emission in the high intensity pumping regime of top-down ZnO nanostructures and thin films grown on c-sapphire substrates by pulsed laser deposition. physica status solidi (c), 2008, 5 (9), pp.3095-3097. ⟨10.1002/pssc.200779298⟩. ⟨hal-02452741⟩