Ohmic contact on single ZnO nanowires grown by MOCVD

Wei Geng (1) , Serguei Kochtcheev (1) , Corinne Sartel (2) , Vincent Sallet (2) , Michaël Molinari (3) , Olivier Simonetti (3) , Gilles Lerondel (1) , Louis Giraudet (3) , Christophe Couteau (1)

1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
2 GEMAC - Groupe d'Etude de la Matière Condensée
3 LRN - Laboratoire de Recherche en Nanosciences - EA 4682

We present work on the fabrication and the characterization of ohmic contacts on single zinc oxide nanowires grown by metalorganic chemical vapour deposition. We demonstrate pre‐positionning of single nanowires before electronic‐beam lithography for 2 point metallic contacts. We characterize single nanowires by microphotoluminescence and by current‐voltage measurements. I–V results present a linear curve down to 1 mV with resistivities from 0.23 to 2.4 Ω ċ cm are measured, consistent with previous observation on ZnO nanowires.

Keywords: ZnO; nanowires; ohmic contact; nanofabrication

Domains: Micro and nanotechnologies/Microelectronics

Wei Geng, Serguei Kochtcheev, Corinne Sartel, Vincent Sallet, Michaël Molinari, et al.. Ohmic contact on single ZnO nanowires grown by MOCVD. physica status solidi (c), 2013, pp.n/a-n/a. ⟨10.1002/pssc.201200984⟩. ⟨hal-02437316⟩