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Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization

Abstract : We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.
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https://hal-utt.archives-ouvertes.fr/hal-02383256
Contributor : Daniel Gavrysiak <>
Submitted on : Wednesday, November 27, 2019 - 4:15:40 PM
Last modification on : Friday, January 10, 2020 - 9:10:15 PM

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David Barat, Véronique Bardinal, I. Dika, O. Soppera, Anna Rumyantseva, et al.. Microlens self-writing on vertical laser diodes by Near Infra-Red photo-polymerization. Microelectronic Engineering, Elsevier, 2013, 111, pp.204-209. ⟨10.1016/j.mee.2013.03.155⟩. ⟨hal-02383256⟩

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