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Investigation of the correlation between dielectric function, thickness and morphology of nano-granular ZnO very thin films

Abstract : Thin nano-granular ZnO layers were prepared using a sol–gel synthesis and spin-coating deposition process with a thickness ranging between 20 and 120 nm. The complex dielectric function (ϵ) of the ZnO film was determined from spectroscopic ellipsometry measurements. Up to a critical thickness close to 60 nm, the magnitude of both the real and the imaginary parts of ϵ rapidly increases and then slowly tends to values closer to the bulk ZnO material. This trend suggests a drastic change in the film porosity at both sides of this critical thickness, due to the pre-heating and post-crystallization processes, as confirmed by additional characterization of the structure and the morphology of the ZnO films.
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Submitted on : Thursday, November 21, 2019 - 12:57:17 PM
Last modification on : Wednesday, June 17, 2020 - 9:44:01 AM

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Mickaël Gilliot, Aomar Hadjadj, Jérôme Martin. Investigation of the correlation between dielectric function, thickness and morphology of nano-granular ZnO very thin films. Thin Solid Films, Elsevier, 2015, 597, pp.65-69. ⟨10.1016/j.tsf.2015.11.035⟩. ⟨hal-02374069⟩

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