Soft photo structuring of porous silicon in water

Mathieu Juan (1) , Jean-Sébastien Bouillard (1) , Jerome Plain (1) , Renaud Bachelot (1) , Pierre-Michel Adam (1) , Gilles Lerondel (1) , Pascal Royer (1)

1 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

We report on local photo‐induced patterning of porous silicon in water. Scanning probe microscopy images of the sample surface after illumination show that the emission properties as well as the topography are modified according to the interferometric illumination pattern. Local photo‐oxidation is believed to be at the origin of these modifications.

Domains: Materials

Mathieu Juan, Jean-Sébastien Bouillard, Jerome Plain, Renaud Bachelot, Pierre-Michel Adam, et al.. Soft photo structuring of porous silicon in water. physica status solidi (a), 2007, 204 (5), pp.1276-1280. ⟨10.1002/pssa.200674307⟩. ⟨hal-02369870⟩