Skip to Main content Skip to Navigation
Journal articles

Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement

Abstract : We present a heterodyne grating interferometer based on a quasi-common-optical-path (QCOP) design for a two-degrees-of-freedom (DOF) straightness measurement. Two half-wave plates are utilized to rotate the polarizations of two orthogonally polarized beams. The grating movement can be calculated by measuring the phase difference variation in each axis. The experimental results demonstrate that our method has the ability to measure two-DOF straightness and still maintain high system stability. The proposed and demonstrated method, which relies on heterodyne interferometric phase measurement combined with the QCOP configuration, has the advantages of high measurement resolution, relatively straightforward operation, and high system stability.
Document type :
Journal articles
Complete list of metadatas

https://hal-utt.archives-ouvertes.fr/hal-02351858
Contributor : Daniel Gavrysiak <>
Submitted on : Wednesday, November 6, 2019 - 3:36:13 PM
Last modification on : Tuesday, October 6, 2020 - 4:28:06 PM

Identifiers

Collections

CNRS | P2MN | UTT

Citation

Ju-Yi Lee, Hung-Lin Hsieh, Gilles Lerondel, Régis Déturche, Mini-Pei Lu, et al.. Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement. Applied optics, Optical Society of America, 2011, 50 (9), pp.1272. ⟨10.1364/AO.50.001272⟩. ⟨hal-02351858⟩

Share

Metrics

Record views

46