Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution - Archive ouverte HAL Access content directly
Conference Papers Year :

Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution

(1) , (1) , (1) , (1) , (1) , (2) , (2) , (2) , (2)
1
2

Abstract

We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.
Not file

Dates and versions

hal-02318678 , version 1 (17-10-2019)

Identifiers

Cite

Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution. 2010 First International Conference on Sensor Device Technologies and Applications (SENSORDEVICES), Jul 2010, Venice, Italy. pp.190-194, ⟨10.1109/SENSORDEVICES.2010.42⟩. ⟨hal-02318678⟩
13 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More