Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution

Ahmad Sinno (1) , Pascal Ruaux (1) , Luc Chassagne (1) , Suat Topçu (1) , Yasser Alayli (1) , Gilles Lérondel (2) , Sylvain Blaize (2) , Aurélien Bruyant (2) , Pascal Royer (2)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.

Domains: Optics / Photonic; Micro and nanotechnologies/Microelectronics

Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution. 2010 First International Conference on Sensor Device Technologies and Applications (SENSORDEVICES), Jul 2010, Venice, Italy. pp.190-194, ⟨10.1109/SENSORDEVICES.2010.42⟩. ⟨hal-02318678⟩