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Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution

Abstract : We developed a home-made Sample-Holder Unit used for 2D nano-positionning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an Atomic Force Microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.
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https://hal-utt.archives-ouvertes.fr/hal-02318678
Contributor : Daniel Gavrysiak <>
Submitted on : Thursday, October 17, 2019 - 12:22:51 PM
Last modification on : Thursday, March 26, 2020 - 10:16:02 AM

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Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Enlarged Sample Holder for Optical AFM Imaging: Millimeter Scanning with High Resolution. 2010 First International Conference on Sensor Device Technologies and Applications (SENSORDEVICES), Jul 2010, Venice, Italy. pp.190-194, ⟨10.1109/SENSORDEVICES.2010.42⟩. ⟨hal-02318678⟩

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