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Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution

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Abstract

We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an atomic force microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.
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Dates and versions

hal-02313791 , version 1 (11-10-2019)

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Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution. IEEE EUROCON 2009 (EUROCON), May 2009, St. Petersburg, France. pp.2070-2074, ⟨10.1109/EURCON.2009.5167933⟩. ⟨hal-02313791⟩
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