Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution

Ahmad Sinno (1) , Pascal Ruaux (1) , Luc Chassagne (1) , Suat Topçu (1) , Yasser Alayli (1) , Gilles Lerondel (2) , Sylvain Blaize (2) , Aurélien Bruyant (2) , Pascal Royer (2)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

We developed a home-made sample-holder unit used for 2D nano-positioning with millimeter traveling ranges. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. We chose here to characterize highly integrated optical structures. For this purpose, the sample-holder is integrated into an atomic force microscope in order to perform optical imaging. To demonstrate the overall performances, a millimeter scale optical images have been realized.

Domains: Engineering Sciences [physics]; Optics / Photonic; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topçu, Yasser Alayli, et al.. Enlarged sample holder for optical AFM imaging: Millimeter scanning with high resolution. IEEE EUROCON 2009 (EUROCON), May 2009, St. Petersburg, France. pp.2070-2074, ⟨10.1109/EURCON.2009.5167933⟩. ⟨hal-02313791⟩