Properties of chromium thin films deposited in a hollow cathode magnetron powered by pulsed DC or HiPIMS

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Submitted on : Monday, September 9, 2019 - 12:28:36 PM
Last modification on : Monday, September 16, 2019 - 4:36:02 PM

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Alexis de Monteynard, Frédéric Schuster, Alain Billard, Frédéric Sanchette. Properties of chromium thin films deposited in a hollow cathode magnetron powered by pulsed DC or HiPIMS. Surface and Coatings Technology, Elsevier, 2017, 330, pp.241-248. ⟨10.1016/j.surfcoat.2017.10.006⟩. ⟨hal-02281580⟩

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