Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

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https://hal-utt.archives-ouvertes.fr/hal-02281470
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Submitted on : Monday, September 9, 2019 - 11:34:02 AM
Last modification on : Monday, September 16, 2019 - 4:36:01 PM

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Imane Bouabibsa, Salim Lamri, Akram Alhussein, Tiberiu Minea, Frédéric Sanchette. Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process. Surface and Coatings Technology, Elsevier, 2018, 354, pp.351-359. ⟨10.1016/j.surfcoat.2018.09.033⟩. ⟨hal-02281470⟩

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