Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process - Université de technologie de Troyes Access content directly
Journal Articles Surface and Coatings Technology Year : 2018

Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

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Mechanics of materials [physics.class-ph]

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https://hal-utt.archives-ouvertes.fr/hal-02281470

Submitted on : Monday, September 9, 2019-11:34:02 AM

Last modification on : Friday, March 24, 2023-2:53:12 PM

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hal-02281470 , version 1 (09-09-2019)

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Imane Bouabibsa, Salim Lamri, Akram Alhussein, Tiberiu Minea, Frédéric Sanchette. Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process. Surface and Coatings Technology, 2018, 354, pp.351-359. ⟨10.1016/j.surfcoat.2018.09.033⟩. ⟨hal-02281470⟩

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CNRS UNIV-PARIS-SACLAY UTT UMR8578 GS-ENGINEERING GS-PHYSIQUE INSTITUT-SCIENCES-LUMIERE
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