Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process - Archive ouverte HAL Access content directly
Journal Articles Surface and Coatings Technology Year : 2018

Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

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Engineering Sciences [physics] Mechanics [physics.med-ph] Mechanics of materials [physics.class-ph]

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Submitted on : Monday, September 9, 2019-11:34:02 AM

Last modification on : Monday, October 17, 2022-1:41:44 PM

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hal-02281470 , version 1 (09-09-2019)

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Imane Bouabibsa, Salim Lamri, Akram Alhussein, Tiberiu Minea, Frédéric Sanchette. Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process. Surface and Coatings Technology, 2018, 354, pp.351-359. ⟨10.1016/j.surfcoat.2018.09.033⟩. ⟨hal-02281470⟩

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CNRS UNIV-PARIS-SACLAY UTT UMR8578 GS-ENGINEERING INSTITUT-SCIENCES-LUMIERE
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