Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

Imane Bouabibsa; Salim Lamri; Akram Alhussein; Tiberiu Minea; Frédéric Sanchette

Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

Imane Bouabibsa ¹ Salim Lamri ¹ Akram Alhussein ¹ Tiberiu Minea ² Frédéric Sanchette ¹

1 LASMIS - Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée

ICD - Institut Charles Delaunay

2 LPGP - Laboratoire de physique des gaz et des plasmas

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Mechanics [physics.med-ph] / Mechanics of materials [physics.class-ph]

Complete list of metadatas

https://hal-utt.archives-ouvertes.fr/hal-02281470
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Monday, September 9, 2019 - 11:34:02 AM
Last modification on : Monday, September 16, 2019 - 4:36:01 PM

Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

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Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process

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Plasma investigations and deposition of Me-DLC (Me = Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process