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Journal Articles Surface and Coatings Technology Year : 2013

Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition

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Abstract

AlCrN coatings were prepared by vacuum cathodic arc deposition. This low-temperature technique has been chosen due to its versatility, allowing the industrial up-scaling. In this study, the attention was focused on the correlation of the bias voltage with the resulting mechanical–tribological properties. For this purpose, the bias voltage was varied from 0 to − 150 V. Indeed, the variation of grain sizes from 24 to 16 nm as well as the residual stresses from − 0.68 to − 8.94 GPa lead to obtain different mechanical–tribological properties. In this context, the sample deposited at − 100 V exhibited an enhanced hardness (50 ± 2 GPa) and an acceptable wear resistance.
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Dates and versions

hal-02278328 , version 1 (04-09-2019)

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F. Lomello, Frédéric Sanchette, Frédéric Schuster, M. Tabarant, Alain Billard. Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition. Surface and Coatings Technology, 2013, 224, pp.77-81. ⟨10.1016/j.surfcoat.2013.02.051⟩. ⟨hal-02278328⟩
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