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Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition

F. Lomello 1 Frédéric Sanchette 2 Frédéric Schuster M. Tabarant 3 Alain Billard 1
1 IRTES - LERMPS - Laboratoire d'Études et de Recherches sur les Matériaux, les Procédés et les Surfaces
2 LASMIS - Laboratoire des Systèmes Mécaniques et d'Ingénierie Simultanée
ICD - Institut Charles Delaunay
3 SEARS - Service d'études analytiques et de réactivité des surfaces
Abstract : AlCrN coatings were prepared by vacuum cathodic arc deposition. This low-temperature technique has been chosen due to its versatility, allowing the industrial up-scaling. In this study, the attention was focused on the correlation of the bias voltage with the resulting mechanical–tribological properties. For this purpose, the bias voltage was varied from 0 to − 150 V. Indeed, the variation of grain sizes from 24 to 16 nm as well as the residual stresses from − 0.68 to − 8.94 GPa lead to obtain different mechanical–tribological properties. In this context, the sample deposited at − 100 V exhibited an enhanced hardness (50 ± 2 GPa) and an acceptable wear resistance.
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https://hal-utt.archives-ouvertes.fr/hal-02278328
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Submitted on : Wednesday, September 4, 2019 - 12:19:36 PM
Last modification on : Wednesday, September 15, 2021 - 3:09:08 PM

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UNIV-BM | UNIV-BM-THESE | CNRS | CEA | DEN | DEN-SACLAY | UTT

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F. Lomello, Frédéric Sanchette, Frédéric Schuster, M. Tabarant, Alain Billard. Influence of bias voltage on properties of AlCrN coatings prepared by cathodic arc deposition. Surface and Coatings Technology, Elsevier, 2013, 224, pp.77-81. ⟨10.1016/j.surfcoat.2013.02.051⟩. ⟨hal-02278328⟩

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