All-fiber reflection-based scattering NSOM with low phase drift for guided-wave imaging on a chip

Yi-Zhi Sun (1, 2) , Binbin Wang (3) , Rafael Salas-Montiel (3) , Sylvain Blaize (3) , Renaud Bachelot (3) , Wei Ding (4)

1 School of Instrumentation Science and Optoelectronics Engineering
2 CAS - Chinese Academy of Sciences [Beijing]
3 L2n - Lumière, nanomatériaux et nanotechnologies
4 Laboratory of Natural Products Pesticides, College of Plant Protection

An all-fiber phase-resolved reflection-based near-field scanning optical microscope with a phase-drift-rate of 0.06°/s is developed. By raster scanning atomic force microscope probe, we measure the complex near-fields and analyse the standing-wave-spectrograms in silicon nano-waveguides.

Mots clés: Scanning electron microscopy; Near field scanning optical microscopy; Spatial frequency; Near field microscopy; Nanopositioning equipment; Optical frequency domain reflectometry

Domaines: Optique [physics.optics]

Yi-Zhi Sun, Binbin Wang, Rafael Salas-Montiel, Sylvain Blaize, Renaud Bachelot, et al.. All-fiber reflection-based scattering NSOM with low phase drift for guided-wave imaging on a chip. Conference on Lasers and Electro-Optics (2019), May 2019, San Jose, United States. pp.SM2H.7, ⟨10.1364/CLEO_SI.2019.SM2H.7⟩. ⟨hal-02270607⟩