Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition

Corinne Sartel (1) , Nadia Haneche (1) , Christèle Vilar (1) , Gaelle Amiri (1) , Jean-Michel Laroche (1) , François Jomard (1) , Alain Lusson (1) , Pierre Galtier (2, 1) , Vincent Sallet (1) , Christophe Couteau (3) , Jenny Lin (3) , Roy Aad (3) , Gilles Lerondel (3)

1 GEMAC - Groupe d'Etude de la Matière Condensée
2 P2MC-ENSMSE - Département Poudres et Matériaux Multi-Composants
3 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

Heteroepitaxial growths of Zn1−xCdxO films were performed on R-oriented sapphire substrates by metal-organic chemical-vapor deposition. The authors carried out secondary ion mass spectrometry analysis, scanning electron microscopy, photoluminescence, and ellipsometric measurements to investigate the incorporation of cadmium in the layers, as well as its influence on the optical properties. Compositions up to 5.5% Cd were obtained, tuning the photoluminescence emission from 3.36 (ZnO) to 3.1 eV and increasing the refractive index at 600 nm from 1.94 to 2.

Domains: Optics / Photonic

Corinne Sartel, Nadia Haneche, Christèle Vilar, Gaelle Amiri, Jean-Michel Laroche, et al.. Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition. Journal of Vacuum Science & Technology A, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩. ⟨hal-02269663⟩