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Journal articles
Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition
Corinne Sartel
1
Nadia Haneche
1
Christèle Vilar
1
Gaelle Amiri
1
Jean-Michel Laroche
1
François Jomard
1
Alain Lusson
1
Pierre Galtier
2, 1
Vincent Sallet
1
Christophe Couteau
3
Jenny Lin
3
Roy Aad
3
Gilles Lerondel
3
Jean-Michel Laroche 1
Author
François Jomard 1
Author
Alain Lusson 1
Author
Pierre Galtier 2, 1
Author
Vincent Sallet 1
Author IdHAL : vincent-sallet ORCID : https://orcid.org/0000-0003-0949-8397
Christophe Couteau 3
Author Employer institution : Laboratoire de Nanotechnologie et d'Instrumentation Optique
Jenny Lin 3
Author
Roy Aad 3
Author
Gilles Lerondel 3
Author IdHAL : gilles-lerondel
1
GEMAC - Groupe d'Etude de la Matière Condensée (URF de Sciences
Bâtiment Fermat
45 avenue des Etats Unis
78035 Versailles - France)
- UVSQ - Université de Versailles Saint-Quentin-en-Yvelines : UMR8635 (55 avenue de Paris - 78035 Versailles cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR8635 (France)
2
P2MC-ENSMSE - Département Poudres et Matériaux Multi-Composants (158, cours Fauriel F-42023 Saint-Étienne cedex 2 - France)
- Mines Saint-Étienne MSE - École des Mines de Saint-Étienne (158, Cours Fauriel - 42023 Saint Étienne cedex 2 - France)
- IMT - Institut Mines-Télécom [Paris] (37-39 Rue Dareau, 75014 Paris - France)
- SPIN (France)
3
LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique (12 rue Marie Curie - BP 2060 10010 TROYES CEDEX - France)
- ICD - Institut Charles Delaunay (12, rue Marie Curie BP 2060 - 10010 Troyes Cedex - France)
- UTT - Université de Technologie de Troyes (12 rue Marie Curie CS 42060 10004 TROYES CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UMR6281 (France)
Abstract : Heteroepitaxial growths of Zn1−xCdxO films were performed on R-oriented sapphire substrates by metal-organic chemical-vapor deposition. The authors carried out secondary ion mass spectrometry analysis, scanning electron microscopy, photoluminescence, and ellipsometric measurements to investigate the incorporation of cadmium in the layers, as well as its influence on the optical properties. Compositions up to 5.5% Cd were obtained, tuning the photoluminescence emission from 3.36 (ZnO) to 3.1 eV and increasing the refractive index at 600 nm from 1.94 to 2.
Document type :
Journal articles
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https://hal-utt.archives-ouvertes.fr/hal-02269663
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Friday, August 23, 2019 - 10:41:43 AM
Last modification on : Wednesday, June 24, 2020 - 4:18:35 PM
Contributor : Jean-Baptiste Vu Van <>
Submitted on : Friday, August 23, 2019 - 10:41:43 AM
Last modification on : Wednesday, June 24, 2020 - 4:18:35 PM
Identifiers
- HAL Id : hal-02269663, version 1
- DOI : 10.1116/1.3567960
Citation
Corinne Sartel, Nadia Haneche, Christèle Vilar, Gaelle Amiri, Jean-Michel Laroche, et al.. Growth studies and optical properties of Zn1−xCdxO films grown by metal-organic chemical-vapor deposition. Journal of Vacuum Science and Technology A, American Vacuum Society, 2011, 29 (3), pp.03A114. ⟨10.1116/1.3567960⟩. ⟨hal-02269663⟩
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