Large-Scale and Low-Cost fabrication of Silicon Mie Resonators

Wajdi Chaâbani (1, 2) , Julien Proust (2) , Abdallah Chehaidar (1) , Jerome Plain (2)

1 Université de Sfax - University of Sfax
2 L2n - Lumière, nanomatériaux et nanotechnologies

Domaines: Matériaux; Science des matériaux [cond-mat.mtrl-sci]; Micro et nanotechnologies/Microélectronique; Optique / photonique

Wajdi Chaâbani, Julien Proust, Abdallah Chehaidar, Jerome Plain. Large-Scale and Low-Cost fabrication of Silicon Mie Resonators. International Conferene on Energy, Materials and Photonics 2019 (EMP19, Jul.14~16,2019), Jul 2019, Shanghai, China. ⟨hal-02189660⟩