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Large-Scale and Low-Cost fabrication of Silicon Mie Resonators

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https://hal-utt.archives-ouvertes.fr/hal-02189660
Contributor : Jérôme Plain <>
Submitted on : Friday, July 19, 2019 - 7:16:24 PM
Last modification on : Friday, November 15, 2019 - 2:00:03 PM

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  • HAL Id : hal-02189660, version 1

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Wajdi Chaâbani, Julien Proust, Abdallah Chehaidar, Jerome Plain. Large-Scale and Low-Cost fabrication of Silicon Mie Resonators. International Conferene on Energy, Materials and Photonics 2019 (EMP19, Jul.14~16,2019), Jul 2019, Shanghai, China. ⟨hal-02189660⟩

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